AJA ATC-Orion 8E e-beam evaporation system

AJA ATC-Orion 8E e-beam evaporation system

The AJA e-beam Evaporator has a six pocket (15cc) load lock system capable of depositing metals at pressures below 10-7 Torr. The chamber is equipped with an ion mill to physically etch away a few Angstroms to remove the surface impurities before deposition.

Ebeam Evaporator Standard Operation Procedure