AJA Orion 5 UHV sputtering system

AJA Orion 5 UHV sputtering system

The AJA UHV sputtering system is a compact 4 gun system for sputtering metals and dielectrics. It has a load lock feature with fast pumping speed. The sputterer is equipped with RF and DC power supply capable of doing Co Sputtering (can deposit two materials to form alloy).

Sputtering System Standard Operating Procedure