Arradiance atomic layer deposition benchtop system

Arradiance atomic layer deposition benchtop system

The Gemstar ALD from Arradiance is a benchtop unit that deposits low temperature conformal metal, semiconductor, and insulating films on planar and high aspect ratio (HAR) structures. They are designed for uniform conformal growth of films from precursors that have a CVD growth component.

The uniformity of thin films can determine whether a process or device works, the systems are designed to provide the user with the most uniform films possible, even in challenging HAR through-hole applications. The materials that can be deposited are Al2O3, TiO2, HfO2, SiO2 and Pt.

ALD Standard Operating Procedure