Equipment
Deposition, Etching and Lithography tools
- AJA ATC-Orion 8E e-beam evaporation system
- AJA Orion 5 UHV sputtering system
- Arradiance atomic layer deposition benchtop system
- Oxford Instruments Plasma-Pro NGP80 Reactive Ion Etcher (RIE)
- Plasma Etch PE 100 oxygen plasma etcher
- EVG semi-automatic double side mask aligner
- Laurell WS-650 Spin Coater
- Bruker Dektak XT-S profilometer
- Amscope MX6R Wafer Inspection Microscope
Biological Sample Preparation Area
- Olympus FSX 100 fluorescence microscope
- Automated Critical Point Dryer CO2 supercritical dryer
- Thermo Scientific, 1300 Series A2 Class II, Type A2 bio safety cabinet
- Fisher HERACELL 150I DUAL STAC incubator
- Invitrogen Countess automated cell counter
- Sorvall ST16R centrifuge
- Cold storage for samples (refrigerator, –20 ˚C and –80 ˚C freezers)
Soft Lithography Laboratory
- Harrick Plasma Cleaner
- PDMS Curing Oven
- Dessicator
