Scheduling and Fees
Scheduling
Tools may be reserved through this online scheduling calendar: http://scscheduler.uchicago.edu/phpscheduleit2/web/
Fees
The cleanroom will be billed at a flat rate on hourly basis, regardless of tool or process used. At least initially, there will not be a materials surcharge. The rates are valid from July 1st 2015 and subject to change.
Hourly User Rate
|
Service Name |
Internal Rate (Academic) | External Rate (Academic) | Industry Rate |
| Clean Room | $35 | $35 | $100 |
| Training / Staff Assistance | $10 | $10 | $70 |
| Device Fabrication by the Staff | $100 | $100 | $200 |
| Soft Lithography | $35 | $35 | $100 |
For Academic (Internal/External) there will be additional charge of $40 per every 100nm deposition of gold, platinum, and palladium.
For industrial user there will be additional charge of $80 per every 100nm deposition of gold, platinum, and palladium (this charge is subject to change based on market price)
In order to receive cleanroom training, potential users must have the approval of their research advisor.
