Policies

All users must be familiar with the cleanroom policies before receiving their initial training. The document is found here.

Billing

This form is used to arrange for billing for use of the cleanroom.

Safety Training

Searle Cleanroom users must complete the following online safety courses before using the cleanroom.

• Fire Safety and Evacuation
• Chemical Hygiene Plan-Laboratory Safety

Fabrication Processes

• Substrate and Mask Cleaning
• Photolithography Process
• Reactive Ion Etch Process Recipe –
  • Diamond Etch
  • Fused Silica (Glass) Etch
  • Niobium Etch
  • PDMS Etch
  • PS(Polystyrene) Etch
  • SiEtch
  • SiO2 Etch
• PDMS Mold Prep